ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements
Top Cited Papers
- 1 July 2002
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 414 (1) , 43-55
- https://doi.org/10.1016/s0040-6090(02)00427-3
Abstract
No abstract availableKeywords
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