Texture and surface morphology improvement of Al by two-stage chemical vapor deposition and its integration in an Al plug-interconnect scheme for sub 0.25 μm metallization
- 1 May 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (3) , 1233-1238
- https://doi.org/10.1116/1.581265
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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