SiGeC/Si superlattice microcoolers

Monolithically integrated active cooling is an attractive way for thermal management and temperature stabilization of microelectronic and optoelectronic devices. SiGeC can be lattice matched to Si and is a promising material for integrated coolers. SiGeC/Si superlattice structures were grown on Si substrates by molecular beam epitaxy. Thermal conductivity was measured by the 3ω method. SiGeC/Si superlattice microcoolers with dimensions as small as 40×40 ${\mathrm{\mu m}}^2$ were fabricated and characterized. Cooling by as much as 2.8 and 6.9 K was measured at 25 °C and 100 °C, respectively, corresponding to maximum spot cooling power densities on the order of 1000 ${\mathrm{W/cm}}^2.$