A new and simple concept of tunable two-chip microcavities for filter applications in WDM systems
- 1 November 2000
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 12 (11) , 1522-1524
- https://doi.org/10.1109/68.887731
Abstract
A new and simple two-chip concept for microcavities with application in dense wavelength-division-multiplexed systems as tunable optical filters is presented. The Fabry-Perot cavity is created without any costly distance holder or sacrificial layer by simply utilizing the stress of the dielectric Bragg-mirrors against the semiconductor substrate. Electrostatic tunability is achieved by making use of the high capacitance of the metallized cantilevers holding the actuable membrane.Keywords
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