Microelectromechanical tunable filter with stablehalf symmetric cavity
- 1 October 1998
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 34 (20) , 1967-1968
- https://doi.org/10.1049/el:19981350
Abstract
A novel microelectromechanical tunable filter with a half symmetric cavity structure is described. The device exhibits a 3 dB linewidth of 0.27 nm, more than 70 nm tuning range under a voltage swing of 14 V and less than 0.9 dB insertion loss. The parameters of the optical cavity were tailored to efficiently couple 1550 nm light in and out of the devices using a singlemode fibre without any lenses. The structure exhibits a frequency response of 150 kHz at the 3 dB cutoff point.Keywords
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