Internal stress of vapour-deposited aluminium on aluminium substrate films: Effect of O2 and water incorporated in the substrate
- 1 July 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 188 (2) , 385-394
- https://doi.org/10.1016/0040-6090(90)90301-s
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- On the influence of thermal effects on internal stress measurements during and after deposition of silver, gold and copper filmsThin Solid Films, 1985
- Internal stress of thin silver, copper, gold and chromium films—a comparisonVacuum, 1983