Simple method for the preparation of inp based samples for TEM investigation
- 1 July 1991
- journal article
- research article
- Published by Wiley in Journal of Electron Microscopy Technique
- Vol. 18 (3) , 325-328
- https://doi.org/10.1002/jemt.1060180315
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Analysis of the development of large area surface topography during ion etchingVacuum, 1990
- Cross-sectional TEM specimens of metal contacts to semiconductorsJournal of Electron Microscopy Technique, 1988
- Ion milling of InP specimens with Ar/O2 for transmission electron microscopyJournal of Electron Microscopy Technique, 1987
- Iodine ion milling of indium-containing compound semiconductorsApplied Physics Letters, 1984