Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices
- 1 March 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 1 (1) , 14-22
- https://doi.org/10.1109/84.128051
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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