Vapor phase etching of GaAs in a chlorine system
- 1 June 1981
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 53 (3) , 558-562
- https://doi.org/10.1016/0022-0248(81)90139-1
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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