Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4
- 1 December 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 86 (4) , 359-367
- https://doi.org/10.1016/0040-6090(81)90344-8
Abstract
No abstract availableKeywords
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