Role of hydrogen dilution in improvement of a-SiGe:H alloys
- 1 May 1996
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 198-200, 559-562
- https://doi.org/10.1016/0022-3093(95)00763-6
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Detection of H Atoms in RF-Discharge SiH4, CH4 and H2 Plasmas by Two-Photon Absorption Laser-Induced Fluorescence SpectroscopyJapanese Journal of Applied Physics, 1994
- Two-photon laser-induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane dischargeJournal of Vacuum Science & Technology A, 1994
- Structural, optical, and spin properties of hydrogenated amorphous silicon-germanium alloysJournal of Applied Physics, 1989
- Guiding Principle in the Preparation of High-Photosensitive Hydrogenated Amorphous Si–Ge Alloys from Glow-Discharge PlasmaJapanese Journal of Applied Physics, 1986
- Preparation of highly photosensitive hydrogenated amorphous Si-Ge alloys using a triode plasma reactorApplied Physics Letters, 1985