Direct and accurate measurement of etch rate of polymer films under far-UV irradiation
- 9 March 1987
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (10) , 624-625
- https://doi.org/10.1063/1.98101
Abstract
No abstract availableKeywords
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- Self-developing photoetching of poly(ethylene terephthalate) films by far-ultraviolet excimer laser radiationApplied Physics Letters, 1982