Abstract
A new surface passivation using P2S5/(NH4)2S on GaAs Schottky barrier diodes formed by Au and Al contacts was investigated, and the results were compared with those of (NH4)2Sx‐ and NH4OH/HF‐treated devices. With new surface treatment, the effective barrier heights for both the Al‐ and Au‐GaAs Schottky diodes were found to vary with the work function of metals, which is clear evidence of the lower surface state density in these diodes. Results of the IV and CV measurements show that P2S5/(NH4)2S‐passivated diodes have lower reverse leakage current and higher effective barrier height than that of the (NH4)2Sx‐treated diodes.