An investigation of ion-bombarded silicon by ellipsometry and channeling effect
- 1 August 1982
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 199 (1-2) , 405-408
- https://doi.org/10.1016/0167-5087(82)90244-7
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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