Micromolding and photopolymerization
- 1 January 1997
- journal article
- other
- Published by Wiley in Advanced Materials
- Vol. 9 (11) , 927-929
- https://doi.org/10.1002/adma.19970091117
Abstract
Micromolding techniques for the fabrication of polymer microstructures are discussed with reference to the features important for commercial success. Particular emphasis is placed on a recently developed photo‐polymerization reaction injection molding (RIM) technique. The progress made to date on the molding of microstructures using this technique is detailed and compared with thermally initiated RIM. The goal is to fabricate structures with lateral dimensions in the micrometer range, structural details in the submicrometer range, and high aspect ratios.Keywords
This publication has 5 references indexed in Scilit:
- Combination of LIGA with other microstructure technologiesMicrosystem Technologies, 1996
- High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithographyMicrosystem Technologies, 1996
- The LIGA technique and its potential for microsystems-a surveyIEEE Transactions on Industrial Electronics, 1995
- Fabrication of microstructures with extreme structural heights by reaction injection moldingMakromolekulare Chemie. Macromolecular Symposia, 1989
- Das LIGA‐Verfahren: Mikrofertigung durch Röntgentiefenlithographie mit Synchrotronstrahlung, Galvanoformung und KunststoffabformungPhysikalische Blätter, 1988