The role of energetic ion bombardment in silicon-fluorine chemistry
- 1 June 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 27 (1) , 243-248
- https://doi.org/10.1016/0168-583x(87)90025-5
Abstract
No abstract availableKeywords
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