High energy ion implantation into diamond and cubic boron nitride
- 1 November 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 62 (1) , 81-98
- https://doi.org/10.1016/0168-583x(91)95933-5
Abstract
No abstract availableKeywords
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