Fabrication of contact electrodes in Si for nanoelectronic devices using ion implantation
- 1 January 2005
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 239 (3-4) , 335-341
- https://doi.org/10.1016/j.apsusc.2004.05.285
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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