Room-temperature irradiation of silicon doped with carbon
- 1 August 1987
- journal article
- letter
- Published by IOP Publishing in Semiconductor Science and Technology
- Vol. 2 (8) , 554-557
- https://doi.org/10.1088/0268-1242/2/8/015
Abstract
The temperature at which silicon is subjected to 'room-temperature' radiation damage is shown to determine the sequence of reactions undergone by the radiation products. For 'low'-temperature irradiation the production of interstitial carbon (Ci) atoms saturates rapidly with increasing radiation dose when only a small fraction of the carbon has been converted to Ci atoms. 'High'-temperature irradiation produces spontaneous pairing of Ci with substitutional carbon atoms. The carbon pairs trap further damage products to form a set of four perturbed centres. The transition from the 'low' to the 'high' temperatures occurs rapidly, e.g. between 40 and 60 degrees C.Keywords
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