Properties of Superconducting ZrN Thin Films Deposited by dc Reactive Magnetron Sputtering
- 1 May 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (5A) , L570
- https://doi.org/10.1143/jjap.26.l570
Abstract
The structural, superconducting and optical properties of ZrN thin fims deposited on single-crystal sapphire substrates by dc reactive magnetron sputtering are investigated. Their properties, in particular superconducting T cs, strongly depend on substrate temperatures. Films with a highly (100) textured B1 structure, which are deposited at substrate temperatures above 700°C, exhibit T cs and residual resistivity ratios as high as 10.0 K and 15. Systematic changes in the wavelength of the optical reflectivity edge suggests that Zr vacancies suppress T c for films deposited at lower substrate temperatures.Keywords
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