The effects of Ar and He dilution of silane plasmas on the microstructure of a-Si:H detected by small-angle X-ray scattering
- 1 December 1993
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 164-166, 131-134
- https://doi.org/10.1016/0022-3093(93)90509-v
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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