MATERIALS PROCESSING WITH EXCIMER LASERS
- 1 January 1990
- journal article
- research article
- Published by Taylor & Francis in Materials and Manufacturing Processes
- Vol. 5 (4) , 617-640
- https://doi.org/10.1080/10426919008953281
Abstract
Engineering applications of lasers in advanced technologies have grown rapidly in the last decade. The range of these applications include microlithography, cutting of polymers, ceramics, glass and metals, the marking of surface mount devices such as ceramic capacitors and deposition of films including diamond coatings and high temperature superconductive thin films. The potential for excimer lasers in the workplace has been expanding dramatically recently because of two parallel areas of development: increased reliability and performance achieved by the manufacturers, and development of new applications by major research teams. This review discusses both the history and future of excimer technology and applications.Keywords
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