Waveguide photodetectors for the near-infrared in polycrystalline Germanium on silicon

Abstract
We demonstrate novel near-infrared waveguide photodetectors in polycrystalline germanium deposited on silicon-on-insulator at low temperatures. We present the design, fabrication, and characterization of two photodiodes and their comparison. Without optimization, at 1.55 /spl mu/m, we measured wall-plug and effective responsivities as high as 30 mA/W and in excess of 150 mA/W, respectively.