Stoichiometry in Ti-N barrier layers studied by X-ray emission spectroscopy
- 1 October 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 153 (1-3) , 303-311
- https://doi.org/10.1016/0040-6090(87)90191-x
Abstract
No abstract availableKeywords
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