Phase Transformation Kinetics of TiSi2
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Effects of Sb on phase transformations of amorphous TiSi2 thin filmsJournal of Applied Physics, 1992
- Comparison of transformation to low-resistivity phase and agglomeration of TiSi/sub 2/ and CoSi/sub 2/IEEE Transactions on Electron Devices, 1991
- Nucleation, Transformation and Agglomeration of C54 Phase Titanium DisilicideMRS Proceedings, 1991
- Surface morphology of TiSi2 on siliconThin Solid Films, 1990
- Influence of grain size on the transformation temperature of C49 TiSi2 to C54 TiSi2Journal of Applied Physics, 1987
- Effect of a substrate on the phase transformations of amorphous TiSi2 thin filmsJournal of Applied Physics, 1987
- Metastable phase formation in titanium-silicon thin filmsJournal of Applied Physics, 1985
- First Phase Nucleation And Growth Of Titanium Disilicide With An iPhasis On The Influence Of OxygenMRS Proceedings, 1985
- Physical and X‐Ray Study of the Disilicides of Titanium, Zirconium, and HafniumJournal of the American Ceramic Society, 1956
- Die Kristallstruktur von Ni3Ti und Si2TiZeitschrift für Kristallographie - Crystalline Materials, 1939