Synthesis of gradient thin films by ion beam enhanced deposition
- 1 July 1991
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 139, 220-224
- https://doi.org/10.1016/0921-5093(91)90620-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Synthesis of silicon nitride films by ion-beam-enhanced deposition and their protective properties against oxidationMaterials Science and Engineering: A, 1989
- Ion-beam-assisted coatings for corrosion protection studiesMaterials Science and Engineering: A, 1989
- Formation of noble-metal nitrides by nitrogen implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Synthesis of silicon nitride films by ion beam enhanced depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989