Semiconductor applications of thin films deposited by neutralized ion beam sputtering
- 1 August 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 45 (1) , 47-53
- https://doi.org/10.1016/0040-6090(77)90200-0
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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