Preferential chemical etching of blazed gratings in (110)-oriented GaAs
- 1 March 1979
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 4 (3) , 96-98
- https://doi.org/10.1364/ol.4.000096
Abstract
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This publication has 13 references indexed in Scilit:
- Exact Theory of TE-Wave Scattering From Blazed Dielectric GratingsBell System Technical Journal, 1976
- High-efficiency blazed grating couplersApplied Physics Letters, 1976
- Growth characteristics of GaAs-Ga1−xAlxAs structures fabricated by liquid-phase epitaxy over preferentially etched channelsApplied Physics Letters, 1976
- Optical grating coupling between low-index fibers and high-index film waveguidesApplied Physics Letters, 1976
- Profile and groove-depth control in GaAs diffraction gratings fabricated by preferential chemical etching in H2SO4-H2O2-H2O systemApplied Physics Letters, 1976
- Semiconductor lasers with the light output through the diffraction grating on the surface of the waveguide layerIEEE Journal of Quantum Electronics, 1975
- Grating-coupled double-heterostructure AlGaAs diode lasersIEEE Journal of Quantum Electronics, 1975
- Highly collimated laser beams from electrically pumped SH GaAs/GaAlAs distributed−feedback lasersApplied Physics Letters, 1975
- Directional blazing of waves guided by asymmetrical dielectric gratingsOptics Communications, 1974
- Selective Etching of Gallium Arsenide Crystals in H[sub 2]SO[sub 4]-H[sub 2]O[sub 2]-H[sub 2]O SystemJournal of the Electrochemical Society, 1971