Planar InP/GaInAsP/GaInAs buried-structure avalanche photodiode

Abstract
A new planar InP/GaInAsP/GaInAs buried‐structure avalanche photodiode, which has a buried active region and an n‐InP guardring region, has been developed. A useful guardring effect and a uniform multiplication are obtained in the multiplication range of up to 30. The diode shows a dark current of 10 nA at a bias of 90% of the breakdown voltage, a maximum avalanche gain of 50 under 1.3‐μm light irradiation, and a gain‐bandwidth product of about 16 GHz.