Phosphine and arsine decomposition in CVD reactors for InP and InGaAs growth
- 1 October 1988
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 92 (3-4) , 423-431
- https://doi.org/10.1016/0022-0248(88)90027-9
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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