Monolithically integrated optical displacement sensorin GaAs/AlGaAs
- 23 November 1995
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 31 (24) , 2121-2122
- https://doi.org/10.1049/el:19951455
Abstract
A monolithically integrated displacement sensor has been fabricated in the GaAs/AlGaAs material system. The device is configured as a Michelson interferometer and consists of a DBR laser, a directional coupler, transparent waveguides and a photodetector. Interference fringes could be seen at a measurement distance of up to 45 cm, requiring only the alignment of an external GRIN lens for beam collimation.Keywords
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