On the Miller-indices determination of Si{1 0 0}convex corner undercut planes
- 12 March 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (4) , 833-842
- https://doi.org/10.1088/0960-1317/15/4/022
Abstract
No abstract availableKeywords
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