Temperature and substrate influence on the structure of TiNxOy thin films grown by low pressure metal organic chemical vapour deposition
- 31 March 2000
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 125 (1-3) , 396-399
- https://doi.org/10.1016/s0257-8972(99)00588-5
Abstract
No abstract availableKeywords
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