Ion beam modification of the physical properties of MoSx films
- 1 May 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 228 (1-2) , 252-256
- https://doi.org/10.1016/0040-6090(93)90610-2
Abstract
No abstract availableKeywords
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- Morphological properties of sputtered MoS2 filmsWear, 1983
- Tribological properties of sputtered MoS2 films in relation to film morphologyThin Solid Films, 1980