High current Cu3P liquid metal ion source using a novel extractor configuration
- 21 December 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (25) , 2170-2172
- https://doi.org/10.1063/1.98931
Abstract
It has been found that by utilizing a sharp needle for the extractor electrode in close proximity to the source tip wetted with Cu3P liquid alloy, a large increase (factor ∼300) in ion current is observed in comparison to standard liquid metal ion sources (LMIS’s). In standard previously used LMIS’s the extractor electrode was a flat plane with a circular hole centered on the source needle tip. This new high current source has important applications in focused and broad ion beam deposition systems.Keywords
This publication has 13 references indexed in Scilit:
- Focused ion beam technology and applicationsJournal of Vacuum Science & Technology B, 1987
- Development of boron liquid metal ion source for focused ion beam systemJournal of Vacuum Science & Technology B, 1987
- Theoretical investigation of liquid metal ion sources: Field and temperature dependence of ion emissionApplied Physics A, 1986
- Submicron pattern fabrication by focused ion beamsJournal of Vacuum Science & Technology B, 1985
- Measurement of surface defects by low-energy electron diffractionApplied Physics A, 1984
- Shape of a liquid metal ion sourceApplied Physics A, 1984
- An exact solution of Laplace's equation for cuspidal geometryApplied Physics A, 1984
- Use of a modified paraxial formalism for particle beam dynamics: Application to liquid metal ion sourcesJournal of Vacuum Science & Technology B, 1983
- Trajectory calculations of the extraction region of a liquid-metal ion sourceJournal of Vacuum Science and Technology, 1981
- Advances in molten metal field ion sourcesNuclear Instruments and Methods in Physics Research, 1981