Microfabrication of submicron nozzles in silicon nitride
- 1 June 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 1 (2) , 86-88
- https://doi.org/10.1109/84.157362
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Micromachined silicon microvalvePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fabrication of 15 μm thick Si-hole masks for demagnifying projection systems for ion- or electron-beamsMicroelectronic Engineering, 1987
- Fabrication of an integrated, planar silicon ink-jet structureIEEE Transactions on Electron Devices, 1979
- The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) SiliconJournal of the Electrochemical Society, 1978