Polysilicon microstructures
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A polysilicon-diaphragm-based pressure sensor technologyJournal of Physics E: Scientific Instruments, 1987
- Fabrication techniques for integrated sensor microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1986
- Solid-state processes to produce hemispherical components for inertial fusion targetsJournal of Vacuum Science and Technology, 1981