Temperature dependence of boron surface segregation in Si molecular beam epitaxial growth on the Si(111) √3 × √3-B surface
- 1 May 1995
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 150, 989-993
- https://doi.org/10.1016/0022-0248(95)80088-t
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Influence of Boron Adsorption over Si(111) Surface on Si Molecular Beam Epitaxial Growth Studied by Reflection High-Energy Electron DiffractionJapanese Journal of Applied Physics, 1994
- Temperature Dependence of Boron Adsorption during HBO2 Irradiation on Si(111) Surface Evaluated by Reflection High-Energy Electron DiffractionJapanese Journal of Applied Physics, 1994
- Boron delta-doped Si metal semiconductor field-effect transistor grown by molecular-beam epitaxyApplied Physics Letters, 1993
- Molecular beam epitaxial growth of Si on Ga-activated Si(111) surfaceApplied Physics Letters, 1992
- Surfactant Epitaxy of Si on Si(111) Mediated by SnJapanese Journal of Applied Physics, 1991
- Boron delta doping in Si and Si0.8Ge0.2 layersApplied Physics Letters, 1990
- B doping effect on reflection high-energy electron diffraction intensity oscillation during gas source silicon molecular beam epitaxial growthApplied Physics Letters, 1990
- Stability of boron- and gallium-induced surface structures on Si(111) during deposition and epitaxial growth of siliconApplied Physics Letters, 1989
- Atomic layer doped field-effect transistor fabricated using Si molecular beam epitaxyApplied Physics Letters, 1989