Optimization of a low-stress silicon nitride process for surface-micromachining applications
- 28 February 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 58 (2) , 149-157
- https://doi.org/10.1016/s0924-4247(96)01397-0
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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