Damage depth profiles determination by ellipsometry: a new numerical algorithm
- 20 August 1993
- journal article
- Published by Elsevier in Surface Science
- Vol. 293 (3) , 195-201
- https://doi.org/10.1016/0039-6028(93)90313-9
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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