Investigation of ion-implanted semiconductors by ellipsometry and backscattering spectrometry
- 1 June 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 116 (1-3) , 191-198
- https://doi.org/10.1016/0040-6090(84)90423-1
Abstract
No abstract availableKeywords
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