Thermal Ta2O5––alternative to SiO2 for storage capacitor application
- 12 June 2002
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 42 (8) , 1171-1177
- https://doi.org/10.1016/s0026-2714(02)00088-4
Abstract
No abstract availableKeywords
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