Sputtering of a gold hemispherical single crystal
- 1 April 1967
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine
- Vol. 15 (136) , 673-685
- https://doi.org/10.1080/14786436708220915
Abstract
A hemispherical gold single crystal was bombarded at normal incidence on its whole surface by 5 kev argon ions in a glow discharge. The final shape of the sample exhibits grooves and hills corresponding to crystallo-graphic directions and planes of low indices, thus revealing the anisotropy of the sputtering yield. In the energy range used here, the experiment showed that sputtering yield is a decreasing function of the transparency. This law fails for small regions of the crystal containing the (111) poles which have an anomalously high sputtering yield with respect to the other regions. The deposit obtained on a hemispherical collector is only formed by 〈110〉 spots, suggesting that the outgoing atoms from each point of the surface follow mainly the 〈110〉 directions.Keywords
This publication has 11 references indexed in Scilit:
- Sputtering of Single-Crystal CopperJournal of Applied Physics, 1966
- A simple theory of single crystal sputteringNuclear Instruments and Methods, 1965
- The penetration of energetic ions through the open channels in a crystal latticePhilosophical Magazine, 1963
- A direct measurement of the focusing energy for collision sequences in goldPhysics Letters, 1963
- Super ranges of fast ions in copper single crystalsPhysics Letters, 1963
- Experimental Evidence for the Increase of Heavy Ion Ranges by Channeling in Crystalline StructurePhysical Review Letters, 1963
- Sputtering Experiments with 1- to 5-keV Ar+ IonsJournal of Applied Physics, 1963
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961
- Focusing in Collision Problems in SolidsJournal of Applied Physics, 1957
- Controlled Sputtering of Metals by Low-Energy Hg IonsPhysical Review B, 1956