Carbon Precipitation in Cz and Efg Silicon

Publisher Website

1 January 1985

journal article
Published by Springer Nature in MRS Proceedings

Vol. 59
https://doi.org/10.1557/proc-59-439

Abstract

No abstract available

Keywords

This publication has 6 references indexed in Scilit:

Luminescence of carbon and oxygen related complexes in annealed silicon
Applied Physics Letters, 1984
Supersaturation of self-interstitials and undersaturation of vacancies during phosphorus diffusion in silicon
Applied Physics Letters, 1984
Enhanced Carbon Diffusion in Silicon During 900°0 Annealing
MRS Proceedings, 1984
Ebic evidence for Carbon-based Gettering in EFG Silicon
MRS Proceedings, 1984
Interstitial supersaturation near phosphorus-diffused emitter zones in silicon
Applied Physics Letters, 1979
Diffraction contrast from spherically symmetrical coherency strains
Philosophical Magazine, 1963