Distribution and heat-treatment migration studies of Cr implanted GaAs by SIMS
- 1 September 1980
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 23 (1) , 21-24
- https://doi.org/10.1007/bf00899565
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Chromium profiles in semi-insulating GaAs after annealing with a Si3N4 encapsulantApplied Physics Letters, 1979
- Measurement of the chromium concentration in semi-insulating GaAs using optical absorptionJournal of Applied Physics, 1979
- Annealing of Se-implanted GaAs with an oxygen-free CVD Si3N4 encapsulantJournal of Applied Physics, 1978
- Solid solubility of selenium in GaAs as measured by secondary ion mass spectrometryApplied Physics Letters, 1978
- Photoluminescence from chromium in GaAsSolid State Communications, 1977