Solid solubility of selenium in GaAs as measured by secondary ion mass spectrometry
- 1 May 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 32 (9) , 572-573
- https://doi.org/10.1063/1.90134
Abstract
Secondary ion mass spectrometry profiles of redistributed selenium ion‐implanted GaAs samples have been used to determine the solid solubility limit (Css) for this impurity. The data are well approximated by Css=9.5×1023 exp(−1.23±0.02eV/kT) cm−3. It is also shown that carrier concentrations equivalent to this limit can be obtained for annealing temperatures up to 900 °C.Keywords
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