Ion implantation and hydrogen passivation in amorphous silicon films
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4) , 386-388
- https://doi.org/10.1016/0168-583x(89)90809-4
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Hydrogen passivation of silicon sheet solar cellsApplied Physics Letters, 1984
- Implantation damage in amorphous siliconPhilosophical Magazine Part B, 1981
- The effects of ion implantation on the electrical properties of amorphous siliconPhilosophical Magazine Part B, 1980
- Photoluminescence recovery in rehydrogenated amorphous siliconApplied Physics Letters, 1978