Fabrication and characterization of ultraviolet-emitting diodes composed of transparent p-n heterojunction, p-SrCu2O2 and n-ZnO
- 15 May 2001
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 89 (10) , 5720-5725
- https://doi.org/10.1063/1.1367315
Abstract
An ultraviolet light-emitting diode (UV-LED) was realized using a heterojunction composed of the transparent oxide semiconductors and A multilayered film was epitaxially grown on an extremely flat YSZ (111) surface by a pulsed-laser deposition technique. (112) was preferentially grown on ZnO (0001) at 350°C, while the preferential plane was changed into the (100) when the temperature was increased to 600 °C. The grown films were processed by conventional photolithography followed by reactive ion etching to fabricate heterojunction diodes. The resulting devices exhibited rectifying I-V characteristics inherent to junctions. A relatively sharp electroluminescence band centered at 382 nm, attributed to transitions associated with exciton-exciton collision or electron-hole plasma in ZnO, was generated by applying a forward bias voltage greater than the turn-on voltage of 3 V. UV-LED performance characteristics such as threshold current and conversion efficiency improved with higher deposition temperatures. On the other hand, increased laser power density at 600 °C during deposition raised the incidence of insulating layer formation between the p and n layers, probably due to migration of ions doped as an acceptor impurity. The resulting diode emits broad luminescence centered at 500 nm for forward voltage greater than 14 V.
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