Light-enhanced reactivation of donors in hydrogenatedn-type GaAs
- 15 September 1991
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 44 (11) , 5912-5915
- https://doi.org/10.1103/physrevb.44.5912
Abstract
The donors in undoped and S-doped GaAs are passivated by exposure to a hydrogen plasma. The influence of laser illumination (1.54 eV) on the reactivation of the passivated donors at 100 °C is investigated. It is found that the dissociation of the donor-hydrogen complex is greatly enhanced under illumination. The reactivation of the passivated donors follows an initially fast process, which for long annealing times reduces to a reactivation process obeying second-order kinetics. The rate-limiting process is explained in terms of the combination of two hydrogen atoms into a molecular species.Keywords
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