Modification of wetting properties of SiOx surfaces by Ar implantation
- 1 June 2002
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 193 (1-4) , 835-845
- https://doi.org/10.1016/s0168-583x(02)00913-8
Abstract
No abstract availableKeywords
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